Can I read Rapid Thermal Processing [Recurso Electrónico] : Science and Technology on EtoBox?

Rapid Thermal Processing [Recurso Electrónico] : Science and Technology by Richard B. Fair (Eds.) is a nonfiction available to read on EtoBox.

What is Rapid Thermal Processing [Recurso Electrónico] : Science and Technology about?

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Who reads Rapid Thermal Processing [Recurso Electrónico] : Science and Technology?

Author

Richard B. Fair (Eds.)

Publisher

Academic Press, Incorporated

Published

1993

Language

EN

ISBN

9780122476907

Category

nonfiction

Subjects

Engineering, Mathematics, Science