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Can I read Rapid Thermal Processing of Semiconductors on EtoBox?
Rapid Thermal Processing of Semiconductors by Victor E. Borisenko, Peter J. Hesketh (auth.) is a nonfiction available to read on EtoBox.
What is Rapid Thermal Processing of Semiconductors about?
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
Who reads Rapid Thermal Processing of Semiconductors?
It is typically read by self-directed learners exploring a subject in depth.
Common subject areas: history, science, philosophy, social sciences.
- Author
- Victor E. Borisenko, Peter J. Hesketh (auth.)
- Publisher
- Springer Science+Business Media, LLC
- Published
- 1997
- Language
- EN
- ISBN
- 9781489918048
- Category
- nonfiction
- Subjects
- Science, Technology, Chemistry
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