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Rapid thermal processing and beyond : applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany by Wielfried Lerch; Jürgen Niess is a book available to read on EtoBox.

What is Rapid thermal processing and beyond : applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany about?

Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development. This special-topic book, "Rapid Thermal Processing and Beyond: - Applications in Semiconductor Processing" focuses on various aspects of Rapid Thermal and Millisecond Annealing and is arranged so as to follow the major processing steps involved in high-performance transistor fabrication, without claiming to be a complete catalogue of all of the Rapid Thermal Processing (RTP) steps currently in use.Starting with the silicon wafer-material itself and emphasizing various aspects of devices, from advanced gate dielectrics to source/drain engineerin

Author

Wielfried Lerch; Jürgen Niess

Publisher

Trans Tech Publications, Limited

Published

2008

Language

EN

ISBN

9780878493913

Subjects

Science, Engineering, Physics