434000 Fluidized bed furnace : Helmu Hein; assigned to Steag AGInternational Journal of Multiphase Flow1983PDF56 KB
96/06338 Development of Coal Combustion at STEAG. Nitrogen Oxide Primary Measures and Pressurized Coal CombustionFuel and Energy Abstracts1996PDF194 KB
SPIE Proceedings [SPIE Photomask Technology 2002 - Monterey, CA (Tuesday 1 October 2002)] 22nd Annual BACUS Symposium on Photomask Technology - STEAG HamaTech Resist Coater ASR5000 - tool concept and process results -Krauss · SPIE2002PDF196 KB
SPIE Proceedings [SPIE Photomask Technology 2002 - Monterey, CA (Tuesday 1 October 2002)] 22nd Annual BACUS Symposium on Photomask Technology - Mask patterning using chemically amplified resists and the novel STEAG HamaTech Blank Coater ASR5000SPIE2002PDF766 KB
SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - E-beam direct-write lithography for the 45nm node using the novel STEAG HamaTech single substrate coat-bake-develop ModuTrackBerger · SPIE2005PDF988 KB
