Electrical Stability of Thin Nitroxide Layers on Silicon after RTO/RTN/RTO-TreatmentWeidner, G.Trans Tech Publications, Ltd.1991DOI 10.4028/www.scientific.net/ssp.19-20.599
Properties of Thin Inter-Polysilicon Reoxidized Nitrided Oxides Prepared by Rapid Thermal Processing (RTO/RTN/RTO)Cheung, Andrew W.Cambridge University Press1989DOI 10.1557/proc-146-483
RTO VOC Oxidizers Wheel Abration SystemsElsevier ScienceElsevier Science2003DOI 10.1016/s0026-0576(03)90145-0