Batch ALD: Characteristics, Comparison with Single Wafer ALD, and ExamplesErnst GrannemanElsevier Science2007DOI 10.1016/j.surfcoat.2007.05.009
Partial Deletions of Putative Adrenoleukodystrophy (ALD) Gene in Japanese ALD PatientsRyoko KoikeHindawi Limited1995DOI 10.1002/humu.1380060314
Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALDPotts, Stephen E.John Wiley and Sons2013DOI 10.1002/cvde.201207033
ALD of Vanadium OxideThe Electrochemical SocietyThe Electrochemical Society2009DOI 10.1149/ma2009-02/23/2013