Can I read Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) on EtoBox?

Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) by Markku Tilli; Mervi Paulasto-Kröckel; Matthias Petzold; Horst Theuss; Teruaki Motooka; Veikko Lindroos is a nonfiction available to read on EtoBox.

What is Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) about?

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to u

Who reads Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies)?

Author

Markku Tilli; Mervi Paulasto-Kröckel; Matthias Petzold; Horst Theuss; Teruaki Motooka; Veikko Lindroos

Publisher

Elsevier

Published

2020

Language

EN

ISBN

9780128177877

Category

nonfiction

Subjects

Science, Engineering, Stem