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Handbook of Silicon Based MEMS Materials and Technologies, Second Edition by Markku Tilli; Teruaki Motooka; Veli-Matti Airaksinen; Sami Franssila; Mervi Paulasto-Kröckel; Veikko Lindroos is a nonfiction available to read on EtoBox.

What is Handbook of Silicon Based MEMS Materials and Technologies, Second Edition about?

__The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition,__ is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. * Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques * Shows how to protect devices from the environment and decre

Who reads Handbook of Silicon Based MEMS Materials and Technologies, Second Edition?

Author

Markku Tilli; Teruaki Motooka; Veli-Matti Airaksinen; Sami Franssila; Mervi Paulasto-Kröckel; Veikko Lindroos

Publisher

William Andrew Publishing

Published

2015

Language

EN

ISBN

9786056056062

Category

nonfiction

Subjects

Technology, Science, Engineering