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Dynamic Spectroscopic Imaging Ellipsometry for Thickness Measurement Based on a Dual-Comb System by Ruixue Zhang; Guanhao Wu; Qiang Cong; Ding Yuan; Fanxin Sun; Jian Ding is a book available to read on EtoBox.

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Lightweight multifunctional devices, such as thin-film antennas and solar sails, are important for lightweight spacecraft development. The thickness and uniformity of thin films directly influence the performance capabilities, and need to be measured and monitored at high speed with high-precision approaches during their fabrication. Imaging ellipsometry is a standard metrology tool for evaluating thin films with the advantages of being non-contact, non-destructive, and sensitive. Conventional imaging ellipsometry using polarization modulation and phase-shifting methods is subject to trade-offs between precision, measurement speed and spectral accuracy. In this paper, we demonstrate a fast and high-precision dual-comb spectroscopic imaging ellipsometry for thin-film thickness uniformity measurement with no moving element by implementing a digital micromirror device (DMD). By utilizing our proposed dual-comb imaging ellipsometry, the spatial resolution of 3 mm × 2 mm and the thickness measurement repeatability of 5.6 nm is obtained within 5 ms, which is three orders of magnitude faster compared with the traditional ways. Our method provides a convenient and efficient solution for hi

Author

Ruixue Zhang; Guanhao Wu; Qiang Cong; Ding Yuan; Fanxin Sun; Jian Ding

Publisher

Springer Nature Singapore Pte Ltd Fka Springer Science + Business Media Singapore Pte Ltd

Published

2023

Language

EN

ISBN

9789819940974

Subjects

Science, Engineering, Physics