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Silicon Wafers: 1 1. Wafer Diameter 1 2. Type 1 3. Crystallographic Orientation 1 4. Dopant 1 5. Growth Method 1 6. Grade 1 7. Material 2 8. Resistivity 2 9. Thickness 2 10. Polish 2 11. Alignment Fiducial 2 12. Other 2 Coated Wafers 2 a. Oxide Wafers 2 b. Nitride Wafers 2 Glass Wafers: 2 1. Wafer Diameter 2 2. Material 2 3. Crystallographic Orientation 2 4. Grade 3 5. Thickness 3 6. Polish 3 7. Edge Shape 3 8. Alignment Fiducial, Coating Type, Coating Thickness 3 SOI wafers: 3 1. Device Thickness 3 2. Growth Method 3 3. Device Resistivity 3 4. BOx 3 5. Handle Thickness 3 6. Growth Method 3 7. Handle Resistivity 3 8. Backside 3 SOS Wafers: 4 1. Diameter 4 2. Material 4 3. Upper Material 4 4. Upper Thickness 4 5. Resistivity 4 6. Dopant 4 7. Lower Material 4 8. Cut of Lower Material 4 9. Orientation of Plane 4 10. Lower Material Thickness 4 11. Polish 4 12. - 4 13. Alignment, Coating Type, Coating Thickness and Other 4 Sapphire Wafers: 5 1. Wafer Diameter 5 2. Growth Method 5 3. Crystallographic Orientation 5 4. Thickness 5 5. Polish 5 6. Alignment Fiducial 5 7. Other 5 9
- Author
- Jim
- Language
- EN
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