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Chemical Vapour Deposition: Precursors, Processes and Applications Edition by Anthony C Jones; Michael L Hitchman; Mikko Ritala; Jaako Niinisto; Susan Krumdieck; Paul Chalker; Helen C Aspinall; Martyn E Pemble; W. L Gladfelter; Barry Leese is a nonfiction available to read on EtoBox.
What is Chemical Vapour Deposition: Precursors, Processes and Applications Edition about?
A comprehensive overview on the key aspects of chemical vapour deposition processes written by practising CVD technologists who are also leading international experts. Chemical Vapour Deposition (CVD) involves the deposition of thin solid films from chemical precursors in the vapour phase, and encompasses a variety of deposition techniques, including a range of thermal processes, plasma enhanced CVD (PECVD), photon- initiated CVD, and atomic layer deposition (ALD). The development of CVD technology owes a great deal to collaboration between different scientific disciplines such as chemistry, physics, materials science, engineering and microelectronics, and the publication of this book will promote and stimulate continued dialogue between scientists from these different research areas. The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspect
Who reads Chemical Vapour Deposition: Precursors, Processes and Applications Edition?
It is typically read by self-directed learners exploring a subject in depth.
Common subject areas: history, science, philosophy, social sciences.
- Author
- Anthony C Jones; Michael L Hitchman; Mikko Ritala; Jaako Niinisto; Susan Krumdieck; Paul Chalker; Helen C Aspinall; Martyn E Pemble; W. L Gladfelter; Barry Leese
- Publisher
- Royal Society of Chemistry
- Published
- 2008
- Language
- EN
- ISBN
- 9780854044658
- Category
- nonfiction
- Subjects
- Science, Technology, Chemistry
Other editions & translations
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