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21st Annual BACUS Symposium on Photomask Technology : 3-5 October, 2001 Monterey, [California] USA by Giang T. Dao, Brian J. Grenon, chairs/editors; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Society for Optical Engineering; published by SPIE--the International Society for Optical Engineering is a book available to read on EtoBox.

Author
Giang T. Dao, Brian J. Grenon, chairs/editors; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Society for Optical Engineering; published by SPIE--the International Society for Optical Engineering
Publisher
Society of Photo-optical Instrumentation Engineers
Published
2002
Language
EN
ISBN
9780819442901
Subjects
Engineering, Stem
Updated
2026-03-25

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