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Enhanced thermal stability and mechanical properties of nitrogen deficient titanium aluminum nitride (Ti0.54Al0.46Ny) thin films by tuning the applied negative bias voltage by Calamba, K. M.; Schramm, I. C.; Johansson Jõesaar, M. P.; Ghanbaja, J.; Pierson, J. F.; Mücklich, F.; Odén, M. is a Physics and Astronomy article available to read on EtoBox.

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Author
Calamba, K. M.; Schramm, I. C.; Johansson Jõesaar, M. P.; Ghanbaja, J.; Pierson, J. F.; Mücklich, F.; Odén, M.
Publisher
American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
Published
2017
Field
Physics and Astronomy (Physical Sciences)

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