About this scholarly article

Infrared Reflection Absorption Spectroscopy of Photoresist Films on Silicon Wafers: Measuring Film Thickness and Removing Interference Fringes by Gamsky, Christopher J.; Howes, Glenn R.; Taylor, James W. is a scholarly article available to read on EtoBox.

Author

Gamsky, Christopher J.; Howes, Glenn R.; Taylor, James W.

Publisher

American Chemical Society; American Chemical Society (ACS) (ISSN 0003-2700)

Published

1994