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What is Desktop PECVD System for CNT Growth about?

This document proposes the design of a desktop-sized plasma enhanced chemical vapor deposition (PECVD) system to grow vertically aligned carbon nanotubes. Key requirements are control of operating conditions, an adjustable electrode gap, and a small system size. The design consists of three intersecting tubes forming a reaction chamber, with a plasma coil wrapped around a quartz tube to ignite gases. A tray holding the substrate and heating mechanisms slides into the chamber and features an adjustable

Author

Akhmad Jailani

Language

EN