About this scholarly article

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Micromachined tube-type of Si droplet generator by Hida, H.; Inagaki, N.; Koyama, M.; Shikida, M.; Sato, K. is a scholarly article available to read on EtoBox.

Author

Hida, H.; Inagaki, N.; Koyama, M.; Shikida, M.; Sato, K.

Publisher

IEEE

Published

2009