About this scholarly article

AIP Conference Proceedings - Conformal Doping of FINFETs: a Fabrication and Metrology Challenge by Vandervorst, W.; Everaert, J. L.; Rosseel, E.; Jurczak, M.; Hoffman, T.; Eyben, P.; Mody, J.; Zschätzsch, G.; Koelling, S.; Gilbert, M.; Poon, T.; del Agua Borniquel, J.; Foad, M.; Duffy, R.; Pawlak, B. J.; Seebauer, Edmund G.; Felch, Susan B.; Jain, Amitabh; Kondratenko, Yevgeniy V. is a scholarly article available to read on EtoBox.

Author

Vandervorst, W.; Everaert, J. L.; Rosseel, E.; Jurczak, M.; Hoffman, T.; Eyben, P.; Mody, J.; Zschätzsch, G.; Koelling, S.; Gilbert, M.; Poon, T.; del Agua Borniquel, J.; Foad, M.; Duffy, R.; Pawlak, B. J.; Seebauer, Edmund G.; Felch, Susan B.; Jain, Amitabh; Kondratenko, Yevgeniy V.

Publisher

AIP

Published

2008