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Silicon Wafer Channel Layouts for AWJM by D THARUN Kumar is a document available to read on EtoBox.

What is Silicon Wafer Channel Layouts for AWJM about?

The document describes two channel layouts on a 4-inch silicon wafer for AWJM: the L9 layout, which is a 3x3 grid supporting 3 factors at 3 levels, and the L24 layout, a 6x4 grid supporting 6 factors at 3 levels. Both layouts feature channel sizes of 8 mm × 0.5–1.5 mm, with the L24 layout having a spacing of approximately 3 mm. The document emphasizes the importance of nozzle alignment and spacing to prevent edge damage during micro-machining on brittle materials like silicon.

Author

D THARUN Kumar

Language

EN