About this scholarly article

Two-dimensional Analysis of Thermal Oxidation of Silicon by Yasuharu Sakina; Tsuneo Ohno; Satoru Matsumoto is a scholarly article available to read on EtoBox.

Author

Yasuharu Sakina; Tsuneo Ohno; Satoru Matsumoto

Publisher

John Wiley and Sons; Wiley (John Wiley & Sons); Scripta Technica; Wiley (ISSN 8756-663X)

Published

1987

Language

EN

ISBN

9784420700610