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Detection of bulk microdefects underneath the surface of Si wafer using infrared light scattering tomography : Furukawa, J.; Furuya H.; Shingyouji, T. Japanese Journal of Applied Physics, Pt. 1. Vol. 32, No. 11 A, pp. 5178–5179 (Nov. 1993) is a Engineering article available to read on EtoBox.

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silicon substrate were characterized through impulsive stimulated thermal scattering (ISTS). The lowest-order pseudo-Rayleigh acoustic mode of the film was excited and monitored optically. From the measured acoustic phase velocities, the elastic meduli of the film were determined. The ISTS technique also permits measurements of the CNsub(x) thermal diffusivity. The noninvasive optical measurements described can provide a useful guide to refinements in thin film fabrication procedures and for optimization of mechanical and thermal transport properties.

Who reads Detection of bulk microdefects underneath the surface of Si wafer using infrared light scattering tomography : Furukawa, J.; Furuya H.; Shingyouji, T. Japanese Journal of Applied Physics, Pt. 1. Vol. 32, No. 11 A, pp. 5178–5179 (Nov. 1993)?

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0963-8695)

Published

1998

Language

EN

Field

Engineering (Physical Sciences)