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Understanding the Antenna Effect in MOSFETs by Vishal Budhi Sharma is a document available to read on EtoBox.
What is Understanding the Antenna Effect in MOSFETs about?
The antenna effect occurs during chip manufacturing and can cause yield and reliability issues. It happens when a charge builds up on interconnect metal layers disconnected from diffusion regions, allowing high voltages to damage thin gate oxides. Fabs implement antenna rules to limit metal-to-gate area ratios to prevent this. Possible fixes include changing the routing layer order, adding vias to connect gates to top layers, or adding diodes to nets with violations to protect gate oxides. Leakier oxides he
- Author
- Vishal Budhi Sharma
- Language
- EN