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About this Engineering article
Fabrication of Bond and Etch Back Silicon on Insulator Using SiGe-MBE and Selective Etching Techniques by Godbey, D.; Palkuti, L.; Leonov, P.; Krist, A.; Wang, J.; Twigg, M.; Hughes, H.; Hobart, K. is a Engineering article available to read on EtoBox.
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- Author
- Godbey, D.; Palkuti, L.; Leonov, P.; Krist, A.; Wang, J.; Twigg, M.; Hughes, H.; Hobart, K.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1991
- Language
- EN
- Field
- Engineering (Physical Sciences)