About this scholarly article

International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) - Validation of two-dimensional implant and diffusion profiles using novel scanning capacitance microscope sample preparation and deconvolution techniques by Yu, G.M.; Griffin, P.B.; Plummer, J.D. is a scholarly article available to read on EtoBox.

Author

Yu, G.M.; Griffin, P.B.; Plummer, J.D.

Publisher

IEEE

Published

1998