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About this Engineering article
An ellipsometric study of SiO2/Si3N4 double layers on silicon produced by chemical vapour deposition by H.W. Dinges is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- H.W. Dinges
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 1981
- Language
- EN
- Field
- Engineering (Physical Sciences)