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About this scholarly article
10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) - Composition and thermal stability of chemically formed SiO/sub 2/ oxides by Bernhardt, G.; Frankel, D.; Lad, R.J.; Nason, K.; Carbone, T.A. is a scholarly article available to read on EtoBox.
- Author
- Bernhardt, G.; Frankel, D.; Lad, R.J.; Nason, K.; Carbone, T.A.
- Publisher
- IEEE
- Published
- 1999
- Language
- EN
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