Can I read Sputtered TiN films for superconducting coplanar waveguide resonators on EtoBox?

Sputtered TiN films for superconducting coplanar waveguide resonators by Ohya, Shinobu; Chiaro, Ben; Megrant, Anthony; Neill, Charles; Barends, Rami; Chen, Yu; Kelly, Julian; Low, David; Mutus, Josh; O'Malley, Peter; Roushan, Pedram; Sank, Daniel; Vainsencher, Amit; Wenner, James; White, Theodore C.; Yin, Yi; Schultz, B. D.; Palmstrøm, Chris J; Mazin, Benjamin A.; Cleland, Andrew N.; Martinis, John M. is a scholarly article available to read on EtoBox.

What is Sputtered TiN films for superconducting coplanar waveguide resonators about?

We present a systematic study of the properties of TiN films by varying the deposition conditions in an ultra-high-vacuum reactive magnetron sputtering chamber. By increasing the deposition pressure from 2 to 9 mTorr while keeping a nearly stoichiometric composition of Ti(1-x)N(x) (x=0.5), the film resistivity increases, the dominant crystal orientation changes from (100) to (111), grain boundaries become clearer, and the strong compressive strain changes to weak tensile strain. The TiN films absorb a high concentration of contaminants including hydrogen, carbon, and oxygen when they are exposed to air after deposition. With the target-substrate distance set to 88 mm the contaminant levels increase from ~0.1% to ~10% as the pressure is increased from 2 to 9 mTorr. The contaminant concentrations also correlate with in-plane distance from the center of the substrate and increase by roughly two orders of magnitude as the target-substrate distance is increased from 88 mm to 266 mm. These contaminants are found to strongly influence the properties of TiN films. For instance, the resistivity of stoichiometric films increases by around a factor of 5 as the oxygen content increases from 0.

Author

Ohya, Shinobu; Chiaro, Ben; Megrant, Anthony; Neill, Charles; Barends, Rami; Chen, Yu; Kelly, Julian; Low, David; Mutus, Josh; O'Malley, Peter; Roushan, Pedram; Sank, Daniel; Vainsencher, Amit; Wenner, James; White, Theodore C.; Yin, Yi; Schultz, B. D.; Palmstrøm, Chris J; Mazin, Benjamin A.; Cleland, Andrew N.; Martinis, John M.

Published

2013

Language

EN