About this scholarly article

2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers by Jianbing Xie, ; Weizheng Yuan, ; Honglong Chang, is a scholarly article available to read on EtoBox.

Author

Jianbing Xie, ; Weizheng Yuan, ; Honglong Chang,

Publisher

IEEE

Published

2009