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Sulfur Hexafluoride Applications & Properties by karthikumar is a document available to read on EtoBox.
Sulfur hexafluoride is used in semiconductor manufacturing as a fluorine source for etching metals, nitrides, and oxides without generating carbon byproducts. It is also used as an insulating material in electrical transformers and as an inert blanketing agent in other industries. Sulfur hexafluoride has a molecular weight of 146.05 g/mol and exists as a gas at standard temperature and pressure, with a density of 6.27 kg/m3 and specific gravity of 5.114. It has a low solubility in water of 0.007 vol/vol.
- Author
- karthikumar
- Language
- EN