About this scholarly article

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Mathematical model for simulating axisymmetric rod growth with kinetically limited and mass transport limited rates by Lan, Hong; Nassar, Raja; Dai, Weizhong; Zhang, Chaoyang; Yasaitis, John A.; Perez-Maher, Mary Ann; Karam, Jean Michel is a scholarly article available to read on EtoBox.

Author

Lan, Hong; Nassar, Raja; Dai, Weizhong; Zhang, Chaoyang; Yasaitis, John A.; Perez-Maher, Mary Ann; Karam, Jean Michel

Publisher

SPIE

Published

2003

Language

EN