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About this Materials Science article
Atomic Layer Etching of Chrome Using Ion Beams by Park, Jin Woo; Kim, Doo San; Lee, Won Oh; Kim, Ju Eun; Yeom, Geun Young is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Park, Jin Woo; Kim, Doo San; Lee, Won Oh; Kim, Ju Eun; Yeom, Geun Young
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0957-4484)
- Published
- 2018
- Field
- Materials Science (Physical Sciences)