Opening book details…
Can I read Development of self-vibration/detection AFM probe using quartz tuning fork on EtoBox?
Development of self-vibration/detection AFM probe using quartz tuning fork by Hirotaka Hida; Mitsuhiro Shikida; Kenji Fukuzawa; Shirou Murakami; Kenji Sato; Kazuo Asaumi; Yasuroh Iriye; Kazuo Sato is a Engineering article available to read on EtoBox.
What is Development of self-vibration/detection AFM probe using quartz tuning fork about?
## Abstract We present a novel type of quartz tuning‐fork probe, which oscillates and detects its own probe deformation, for atomic force microscopy (AFM) systems. The quartz tuning‐fork structure was fabricated using anisotropic wet etching, and a sharp tip was formed on a beam using a focused ion beam (FIB) system. We evaluated the vibration properties of the fabricated tuning fork with the tip structure in an anti‐phase vibration mode and obtained a Q‐factor value of 2.5 to 2.8 × 10^3^. This value was one order larger than that of a conventional Si probe. We experimentally clarified that the tuning‐fork probe measured a 100‐nm step of the Si surface, as well as the debris with a thickness of a few tens of nanometers on the surface by self‐vibration and self‐detection in cyclic‐contact mode AFM. Copyright © 2009 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.
Who reads Development of self-vibration/detection AFM probe using quartz tuning fork?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Hirotaka Hida; Mitsuhiro Shikida; Kenji Fukuzawa; Shirou Murakami; Kenji Sato; Kazuo Asaumi; Yasuroh Iriye; Kazuo Sato
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); John Wiley & Sons Inc.; Wiley (ISSN 1931-4973)
- Published
- 2009
- Language
- EN
- Field
- Engineering (Physical Sciences)