Opening book details…
About this scholarly article
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Surface and bulk micromachined dual back-plate condenser microphone by Martin, D.T.; Kadirvel, K.; Liu, J.; Fox, R.M.; Sheplak, M.; Nishida, T. is a scholarly article available to read on EtoBox.
- Author
- Martin, D.T.; Kadirvel, K.; Liu, J.; Fox, R.M.; Sheplak, M.; Nishida, T.
- Publisher
- IEEE
- Published
- 2005
- Language
- EN
More by Martin, D.T.; Kadirvel, K.; Liu, J.; Fox, R.M.; Sheplak, M.; Nishida, T.
Browse all works by Martin, D.T.; Kadirvel, K.; Liu, J.; Fox, R.M.; Sheplak, M.; Nishida, T.