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Notes W3 (S&a) by madhanrajkulandaivelu is a document available to read on EtoBox.
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This document outlines the fabrication processes of microheaters and micromachining, focusing on photolithography and two main strategies: bulk and surface micromachining. It details the steps involved in photolithography, including substrate preparation, exposure, and development, as well as a specific example of creating a microheater. Key takeaways emphasize the importance of photoresist types, the differences between micromachining techniques, and their applications in the MEMS industry.
- Author
- madhanrajkulandaivelu
- Language
- EN