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About this Materials Science article
Effect of sputtering target power density on topography and residual stress during growth of nanocomposite nc-TiN/a-SiNx thin films by Zhang, Sam; Sun, Deen; Fu, Yongqing; Du, Hejun; Zhang, Qing is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Zhang, Sam; Sun, Deen; Fu, Yongqing; Du, Hejun; Zhang, Qing
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0925-9635)
- Published
- 2004
- Language
- EN
- Field
- Materials Science (Physical Sciences)
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