About this Engineering article
Lithographic Tolerances Based on Vector Diffraction Theory by Flagello, D. G. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Flagello, D. G.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 1992
- Field
- Engineering (Physical Sciences)