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Determination of the mechanical properties of thin polyimide films deposited on a GaAs substrate by bulging and nanoindentation tests by C. Poilane; P. Delobelle; L. Bornier; P. Mounaix; X. Melique; D. Lippens is a scholarly article available to read on EtoBox.

What is Determination of the mechanical properties of thin polyimide films deposited on a GaAs substrate by bulging and nanoindentation tests about?

In order to characterize the mechanical behavior of thin polyimide films deposited on a GaAs substrate in a membrane configuration, bulging and nanoindentation tests are performed. By these means, Young's modulus of polyimide films, with thicknesses on the micron scale is found to be equal to 2.8 GPa. These two different techniques, which do not rely on the same assumptions, give results in very good agreement. The tensile residual stress in the membranes due to the fabrication process is a decreasing function of the thickness: 12 B | 0 B25 MPa. These membranes are already employed as mechanical support for coplanar wave guides up to the millimeter wave range.

Author

C. Poilane; P. Delobelle; L. Bornier; P. Mounaix; X. Melique; D. Lippens

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0921-5093)

Published

1999

Language

EN