Can I read CyMos Process Final Report on EtoBox?

CyMos Process Final Report by api-309959382 is a document available to read on EtoBox.

What is CyMos Process Final Report about?

The document summarizes the process of fabricating CMOS devices in the CyMos process. Key steps included patterning the gate using self-alignment photolithography, depositing aluminum for contacts via electron beam deposition, and annealing the wafers to improve conductivity. Unfortunately, issues with vacuum during metallization left aluminum oxide on the wafers that could not be removed, requiring use of a backup wafer for characterization. The document provides details on process parameters and goals for

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api-309959382

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EN