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About this Engineering article
Room Temperature Self-Annealing of Electroplated and Sputtered Copper Films by Chen, Michelle; Rengarajan, Suraj; Hey, Peter; Dordi, Yezdi; Zhang, Hong; Hashim, Imran; Ding, Peijun; Chin, Barry is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Chen, Michelle; Rengarajan, Suraj; Hey, Peter; Dordi, Yezdi; Zhang, Hong; Hashim, Imran; Ding, Peijun; Chin, Barry
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1999
- Language
- EN
- Field
- Engineering (Physical Sciences)