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About this Engineering article
A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer by Aydemir, Akin (author);Terzioglu, Yunus (author);Akin, Tayfun (author) is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Aydemir, Akin (author);Terzioglu, Yunus (author);Akin, Tayfun (author)
- Publisher
- Elsevier B.V.
- Published
- 2016
- Field
- Engineering (Physical Sciences)
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