About this scholarly article

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI - Characterization of surface ablation of dielectrics irradiated by single 15-fs laser pulse in air by Neuenschwander, Beat; Roth, Stephan; Grigoropoulos, Costas P.; Makimura, Tetsuya; Pasquier, C.; Sentis, M.; Utéza, O.; Sanner, N. is a scholarly article available to read on EtoBox.

Author

Neuenschwander, Beat; Roth, Stephan; Grigoropoulos, Costas P.; Makimura, Tetsuya; Pasquier, C.; Sentis, M.; Utéza, O.; Sanner, N.

Publisher

SPIE

Published

2016

Language

EN