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About this Engineering article
Micromachined silicon sensors for atomic force microscopy: Farooqui, M. M.; Evans, A. G. R.; Stedman, M.; Haycocks, J. Nanotechnology. 1992 Apr is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0141-6359)
- Published
- 1993
- Language
- EN
- Field
- Engineering (Physical Sciences)