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Foreword 0 Introduction 0 1 Scope 0 2 Normative references 0 3 Terms and definitions 0 4 Quantities 0 4.1 Resolution and strength of optical sectioning 0 4.1.1 General 0 4.1.2 Definition of resolution 0 4.1.3 Definition of strength of optical sectioning 0 4.1.4 Measurement 0 4.2 Uniformity of field and centring accuracy 0 4.2.1 Definition of uniformity of field and centring accuracy 0 4.2.2 Measurement 0 4.3 Co-registration accuracy 0 4.3.1 Definition of co-registration accuracy 0 4.3.2 Measurement of co-registration accuracy 0 4.4 Stability of illumination power 0 4.4.1 General 0 4.4.2 Measurement of stability of illumination power 0 4.5 Field number of the confocal scan optic 0 4.5.1 General 0 4.5.2 Definition of field number of the confocal scan optic 0 4.5.3 Measurement of maximum diameter of scanned field 0 4.6 Scanning frequency 0 Annex A (informative) Theoretical resolution 0 Bibliography 0

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ISO

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reference