About this Engineering article
Design, fabrication, and characterization of bridge-type micro-hotplates with an SU-8 supporting layer for a smart gas sensing system by Iwata, T; Soo, W P C; Matsuda, K; Takahashi, K; Ishida, M; Sawada, K is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Iwata, T; Soo, W P C; Matsuda, K; Takahashi, K; Ishida, M; Sawada, K
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing; ScienceOpen (ISSN 0960-1317)
- Published
- 2017
- Language
- EN
- Field
- Engineering (Physical Sciences)