About this Engineering article
Depositing High-Performance Conductive Thin Films by Using Atomic Layer Deposition by Tsai, Fa Ta; Hou, Hsi Ting; Chao, Ching Kong; Chang, Rwei Ching is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Tsai, Fa Ta; Hou, Hsi Ting; Chao, Ching Kong; Chang, Rwei Ching
- Publisher
- Trans Tech Publications Inc.; Trans Tech Publications, Ltd.; Scitec Publications Ltd. (ISSN 1660-9336)
- Published
- 2015
- Field
- Engineering (Physical Sciences)