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About this Engineering article
Low Sheet Resistance of High-Dose Aluminium Implanted 4H-SiC using (11-20) Face by Negoro, Yuki; Katsumoto, K.; Matsunami, Hiroyuki; Kimoto, Tsunenobu; Schmid, Frank; Pensl, Gerhard is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Negoro, Yuki; Katsumoto, K.; Matsunami, Hiroyuki; Kimoto, Tsunenobu; Schmid, Frank; Pensl, Gerhard
- Publisher
- Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9752)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)