About this scholarly article

Stress, microstructure, and stability of Mo/Si, W/Si, and Mo/C multilayer films by Windt, David L. is a scholarly article available to read on EtoBox.

Author

Windt, David L.

Publisher

AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)

Published

2000

Language

EN