About this scholarly article

2018 22nd International Conference on Ion Implantation Technology (IIT) - Impact of Al-Ion Implantation on the Formation of Deep Defects in n-Type 4H-SiC by Weise, Julietta; Csato, Constantin; Hauck, Martin; Erlekampf, Jurgen; Akhmadaliev, Shavkat; Rommel, Mathias; Mitlehner, Heinz; Rub, Michael; Krieger, Michael; Bauer, Anton; Haublein, Volker; Erlbacher, Tobias; Frey, Lothar is a scholarly article available to read on EtoBox.

Author

Weise, Julietta; Csato, Constantin; Hauck, Martin; Erlekampf, Jurgen; Akhmadaliev, Shavkat; Rommel, Mathias; Mitlehner, Heinz; Rub, Michael; Krieger, Michael; Bauer, Anton; Haublein, Volker; Erlbacher, Tobias; Frey, Lothar

Publisher

IEEE

Published

2018

Language

EN