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About this Engineering article
A Novel Technique for Measuring Defocus with Phase Shift Gratings on a Photomask by Hiroshi Nomura is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Hiroshi Nomura
- Publisher
- Optical Society of Japan; Springer-Verlag; Springer Verlag; Springer Science and Business Media LLC (ISSN 1340-6000)
- Published
- 2001
- Language
- EN
- Field
- Engineering (Physical Sciences)