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About this Engineering article
Epitaxial Lateral Overgrowth of Silicon by Chemical Vapor Deposition on Ultrathin Oxide Layers by Shih, Y. C.; Liu, J. B.; Oldham, W. G.; Gronsky, R. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Shih, Y. C.; Liu, J. B.; Oldham, W. G.; Gronsky, R.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1994
- Language
- EN
- Field
- Engineering (Physical Sciences)
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