Opening book details…
About this Engineering article
Electrical and Structural Properties of Nanolaminate (Al2O3/ZrO2/Al2O3) for Metal Oxide Semiconductor Gate Dielectric Applications by Jeon, Sanghun; Yang, Hyundoek; Park, Dae-Gyu; Hwang, Hyunsang is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Jeon, Sanghun; Yang, Hyundoek; Park, Dae-Gyu; Hwang, Hyunsang
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2002
- Field
- Engineering (Physical Sciences)
More by Jeon, Sanghun; Yang, Hyundoek; Park, Dae-Gyu; Hwang, Hyunsang
Browse all works by Jeon, Sanghun; Yang, Hyundoek; Park, Dae-Gyu; Hwang, Hyunsang